The MFS02 micro flow sensor utilizes thin film technology to layer platinum micro heaters and temperature sensors on an ultrasensitive polymer membrane. The sensor is capable of measuring the thermal ...

Flow sensors can be topographically scanned and measured using attachments that inject static pressure or constant airflow, ...

Measurement of micro-fluidic flow for biochemical and medical purposes is demonstrated with a micro-electromechanical system and two pressure sensor compensating integrated circuits (ICs). The flow ...

Like piezoresistive, piezoelectric, and capacitive sensing techniques devices, sensors based on thermal microelectromechanical systems (MEMS) have enabled motion sensing in accelerometers. These ...

Continuous airflow measurements during anesthesia monitoring, intensive care treatment, and in clinical and ambulatory environments provide important information for the assessment of ...